发明名称 CIRCUIT ARRANGEMENT TO ADJUST AND CALIBRATE A MEMS-SENSOR DEVICE FOR FLOW MEASUREMENT OF GASES OR LIQUIDS
摘要 Circuitry is disclosed for the calibration of heating element and ambient temperature sensors, comprising: a) an amplifier having positive and negative inputs, and an output; b) one or more heating MOS transistors selectably coupled in parallel and having 1) a heating transistor drain coupled to the positive input of the amplifier; 2) a heating transistor source configured to receive a supply voltage; and 3) a heating transistor gate coupled to the amplifier output; c) one or more ambient MOS transistors selectably coupled in parallel and having 1) an ambient transistor drain, 2) an ambient transistor gate coupled to the amplifier output; and 3) an ambient transistor source configured to receive the supply voltage; d) a temperature difference resistance configured: 1) to be coupled at least partially between an ambient connection and the ambient transistor drain; and 2) to be coupled at least partially between the ambient connection and the negative input of the amplifier.
申请公布号 US2009201969(A1) 申请公布日期 2009.08.13
申请号 US20090369645 申请日期 2009.02.11
申请人 ZENTRUM MIKROELEKTRONIK DRESDEN AG 发明人 KRAUSS MATHIAS;JAAFAR MAHA
分类号 G01K15/00 主分类号 G01K15/00
代理机构 代理人
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