| 摘要 |
<p>The invention relates to a sensor element that is capable of sensing dynamic loads and/or vibrations in a machine component, the sensor element comprising a multilayer coating (302) deposited on a substrate (300'). The multilayer coating comprises a sensitive layer (304) of a piezoelectric material and a first electrode layer (308) of a metallic material, which electrode layer serves as a first electrode of the sensor element. The substrate (300') may serve as the second electrode. In order to seal any pinholes in the sensitive layer (304) and thereby prevent short-circuiting between the first and second electrodes, the multilayer coating further comprises a pinhole sealing layer (306) deposited on top of the sensitive layer (304), so as to be sandwiched between the sensitive layer and the first electrode layer (308).</p> |
