GRAPHICAL USER INTERFACES (GUI), METHODS AND APPARATUS FOR DATA PRESENTATION

摘要

A graphical user interface (GUI) including: (a) a group definition module adapted to accept a user input defining groups; (b) a data receiver operable to receive a plurality of individual measurement input datum indicative of status of a substrate; (c) a grouping module configured to assign each of said individual measurement input datum to one of said groups to produce grouped data; and (d) an output module adapted to output the grouped data.