| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a roll-to-roll type thin film production apparatus which performs film deposition while conveying a flexible film substrate and is capable of preventing the mixing of gas among a plurality of film deposition chambers. <P>SOLUTION: The roll-to-roll type thin film production apparatus continuously deposits a film on the flexible film substrate 10, wherein the plurality of film deposition chambers 3, 4, 5 are provided along the conveying direction of the flexible film substrate 10, diffusion prevention chambers 6, 7 cutting off the flow out of gas and gas flow among the film deposition chambers are provided among the respective film deposition chambers, 3, 4, 5, a plurality of gate valves 20, 21 allowing or cutting off the flow of the gas are installed in the diffusion prevention chambers 6, 7, and at least one moving gate valve 20 among the gate valves 20, 21 is configured to move in accordance with the conveying of the flexible film substrate 10. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
