| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating liquid supply system free from the incorporating foreign substances. SOLUTION: The coating liquid supply system supplies a resist liquid to a die coater by taking the resist liquid into an air vent tank 3 the inside of which is opened to the atmospheric pressure from pressure tanks 2a, 2b and introducing clean dry air (CDA) into the air vent tank 3 separately provided with an air release port 36 to which a pipe is connected to open a storage tank 21 capable of storing the resist liquid to the atmospheric pressure and a pressure port 35 to which a pipe is connected to introduce the CDA to the storage tank 21. COPYRIGHT: (C)2009,JPO&INPIT |
