| 摘要 |
PROBLEM TO BE SOLVED: To provide a mounting base structure capable of preventing disconnection, such as, separation from occurring in brazed sections. SOLUTION: This mounting base structure, arranged in a treatment vessel 22 of this treatment apparatus 20 for mounting a treatment object W is provided with: a mounting base 60 having one or plural conductive members 62, extending in a plane direction arranged in the inside and formed of a dielectric material; a cylindrical post 56, erected from the bottom part of the treatment vessel and supporting the mounting base at the upper end; terminal housing recessed parts formed on the undersurface side of the mounting base; upper terminals electrically connected to the conductive member(s) and exposed into the terminal, housing recessed parts; power feed rods 86A-86D inserted into the post; and lower terminals 88A-88D, arranged at the upper ends of the power feed rods, fitted in the terminal housing recessed parts, brazed to the upper terminals, and engaged with the terminal housing recessed parts, with respect to a pull direction of the power feed rods. COPYRIGHT: (C)2009,JPO&INPIT |
