| 摘要 |
PROBLEM TO BE SOLVED: To provide: a probe unit capable of securing excellent contact accuracy and performing highly reliable measurement, even when an error is caused between a contact position and an actual contact position during measurement, by automatically correcting the error; a probing method; and a recording medium. SOLUTION: The reference measure E31 of a third scale E3 is fixed to a third stage 23, a scanning head E32 is fixed to a non-movable part of the third stage, and the position of the movable part of the third stage 23 is measured by the third scale E3 whose measurement performance does not change. Thus, it is made possible to detect the displacement of the contact position of the third stage 23, and the contact position in a Z axis direction can be corrected on the basis of a displacement amount. Thus, even when an error is caused at the contact position by thermal expansion or the like during the measurement, the error is automatically corrected, the excellent contact accuracy of a probe 32 and the electrode pad of a wafer W is secured, and the reliability of electrical measurement is improved. COPYRIGHT: (C)2009,JPO&INPIT
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