| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional measuring apparatus capable of improving measurement accuracy. SOLUTION: The three-dimensional shape measuring apparatus (100) is provided with: a projection optical part (20) for projecting prescribed pattern light to an object to be inspected; an imaging part (30) for imaging a pattern image generated by the projection of the prescribed pattern light onto the object to be inspected and imaging a uniform image generated by the projection of uniform illumination light onto the object to be inspected; a storage part (43) for storing image data of the pattern image from the imaging part; a signal removal part (44) for removing image data with low reliability from among image data stored in the storage part on the basis of the uniform image from the imaging part; and an arithmetic processing part (42) for determining shape information of the object to be inspected on the basis of image data not removed at the signal removal part. COPYRIGHT: (C)2009,JPO&INPIT
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