| 摘要 |
PROBLEM TO BE SOLVED: To detect an interval between a movable body and a guiding support and surely maintaining the interval by surely controlling a floating structure and the movable body with it from contacting the guiding support. SOLUTION: This stage device 100 comprises a slide member including a floating pad 3, gas supply means for supplying a gas to the floating pad 3 (including a compressor 105, a first pressure control valve 104 and a second pressure control valve 102), flow rate measuring means for measuring an exhaust flow rate from a gas exhaust port 6 (including a volumetric flow rate meter 101, an amplifier 106, an A/D converter 107 and a computer 108), and control means constituted to control a gas emission volume to a below-described guiding support from the gas emission port 6 based on the exhaust flow rate measured by the flow rate measuring means (including the computer 108 and a D/A converter 109). COPYRIGHT: (C)2009,JPO&INPIT
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