发明名称 TEM WITH ABERRATION CORRECTOR AND PHASE PLATE
摘要 The invention relates to a TEM with a corrector (330) to improve the image quality and a phase plate (340) to improve contrast. The improved TEM comprises a correction system completely placed between the objective lens and the phase plate, and uses the lenses of the corrector to form a magnified image of the diffraction plane on the phase plate.
申请公布号 US2009200464(A1) 申请公布日期 2009.08.13
申请号 US20090370542 申请日期 2009.02.12
申请人 FEI COMPANY 发明人 TIEMEIJER PETER CHRISTIAAN;DE JONG ALAN FRANK
分类号 G01N23/04 主分类号 G01N23/04
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