发明名称 DEVICE FOR CLAMPING AND POSITIONING AN EVAPORATOR BOAT
摘要 The invention relates to a vacuum treatment plant comprising an evaporator (1) for vacuum coating facilities. The evaporator (1) according to the invention comprises a device for guiding a supply line (4) movable in a gripping direction (A) and intended for gripping and positioning an evaporation boat (3) having a base (22) and further comprises two spacers (18, 19) which the movable supply line (4) flexibly connects to the base (22), with the spacers (18, 19) being disposed on one side each with the movable supply line (4) and with the other side on the base (22), thus enabling the first supply line (4) to be forcibly guided, and with the spacers (18, 19) having such a length and configuration between the first supply line (4) and the base (22) that the guidance direction (B) is essentially parallel to the gripping direction (A) at least across a small deflection range of the spacers (18, 19).
申请公布号 US2009199767(A1) 申请公布日期 2009.08.13
申请号 US20050996640 申请日期 2005.07.27
申请人 APPLIED MATERIALS GMBH & CO. KG 发明人 HEIN STEFAN;KLEIN WOLFGANG
分类号 C23C16/54 主分类号 C23C16/54
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