| 摘要 |
PROBLEM TO BE SOLVED: To avoid instability of coating due to drying of a nozzle tip of an inkjet coating device during movement to a coating position. SOLUTION: A coating unit comprises a coating head 117 and a dummy coating table 111, a dummy coating container 112, a dummy coating table moving stage 113, a head elevation stage 114, and a coating unit base 116, and the coating head 117 comprises an inkjet head 110 and a head holder 115. An inkjet head 110 having a discharge nozzle is fitted to a head holder 115 and can move up and down through the head elevation stage 114. The dummy coating container 112 is fitted to the dummy coating table 111, and can move between a dummy coating position and a standby position through the dummy coating table moving stage 113. Dummy coating on the dummy coating table installed nearby the nozzle is carried out right before coating for repair of missing. The nozzle tip is prevented from being dried and then even a large-sized substrate can be coated stably with a repairing material. COPYRIGHT: (C)2009,JPO&INPIT |
