DIE HEAD AND DIE COATER EQUIPPED WITH IT

摘要

PROBLEM TO BE SOLVED: To provide a die head capable of sufficiently discharging air in a manifold, and a die coater equipped with it.

SOLUTION: In the die head 3 constituted so that the manifold 23 for supplying a resist liquid R to first and second slits 24 and 25 is formed so as to extend in a longitudinal direction, an introducing port 15 for introducing the resist liquid R is provided to the upper end of the manifold 23 and the resist liquid R is discharged from the first and second slits 24 and 25 connected to the lower end of the manifold 23, the upper wall surface 22e which forms the manifold 23 has a gradient in the longitudinal direction from the lower end of the introducing port 15 and air discharge ports 16a and 16b for discharging air are provided to the upper end thereof.

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