| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide vacuum processing equipment that is free from a microwave leakage and has a long life. <P>SOLUTION: The vacuum processing equipment 1 has a conductive elastic member (first elastic member 55), which elastically deforms to come in close contact with a ground electrode film 34 and a vacuum tank 12, so that the contact area is large and the ground electrode film 34 is electrically connected to the vacuum tank 12. A conductive shield 33 is electrically connected to the vacuum tank 12 through the ground electrode film 34 and the first elastic member 55. Consequently, when a microwave is emitted, no abnormal discharge is generated in the gap between the conductive shield 33 and an internal wall surface of a through-hole 9. <P>COPYRIGHT: (C)2009,JPO&INPIT |
