发明名称 |
Apparatus for Manufacturing Light Emitting Elements and Method of Manufacturing Light Emitting Elements |
摘要 |
An apparatus of manufacturing a light emitting element having a plurality of layers including an organic layer on a substrate to be processed is disclosed. The apparatus includes a plurality of process chambers to which the substrate to be processed is transferred in series, wherein the plurality of process chambers are substantially linearly connected to one another and wherein adjacent two of the process chambers are filled with gas that does not react with a layer on the substrate to be processed when the substrate to be processed is transferred between the two process chambers.
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申请公布号 |
US2009202708(A1) |
申请公布日期 |
2009.08.13 |
申请号 |
US20070304324 |
申请日期 |
2007.06.13 |
申请人 |
MOYAMA KAZUKI;YAGI YASUSHI;NOZAWA TOSHIHISA;OHMI TADAHIRO;KAWAMURA CHUICHI;YOSHINO KIMIHIKO |
发明人 |
MOYAMA KAZUKI;YAGI YASUSHI;NOZAWA TOSHIHISA;OHMI TADAHIRO;KAWAMURA CHUICHI;YOSHINO KIMIHIKO |
分类号 |
B05D5/06;C23C16/54 |
主分类号 |
B05D5/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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