CERAMIC JOINED BODY FOR GAS JETTING PORT AND GAS DISTRIBUTION PLATE, AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a ceramic joined body providing stable flow rate when used as a gas jetting port of a gas distribution plate, and to provide the gas distribution plate using the same and a method of manufacturing the gas distribution plate with high yield.

SOLUTION: The ceramic joined body for the gas jetting port is obtained by directly joining a porous ceramic obtained by pressure sintering and having a necking structure of a ceramic coarse granule to a circular dense ceramic without interposing a joining layer. The pressure sintering is discharge plasma sintering.

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