发明名称 PIEZOELECTRIC VIBRATING REED, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, WAVE CLOCK, AND METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATING REED
摘要 <P>PROBLEM TO BE SOLVED: To provide a tuning-fork piezoelectric vibrating reed that is made further compact while securing a constant R1 value, and to provide a method of manufacturing a piezoelectric vibrating reed for manufacturing the piezoelectric vibrating reed describe above. <P>SOLUTION: The piezoelectric vibrating reed 2 includes: a piezoelectric plate 11 having a pair of vibrating arms 8 and 9 provided parallel to each other, a base portion 10 to integrally fix the pair of vibrating arms at a base end side thereof, and grooves 17 formed on both principal surfaces of the pair of vibrating arms in a constant length L from base ends toward tip ends of the vibrating arms; and an electrode film formed of a base metal layer and a finishing metal layer laminated on outer surfaces of the piezoelectric plate and configured to vibrate the pair of vibrating arms when a predetermined voltage is applied thereon. The finishing metal layer of the electrode film is removed either partially or entirely at least in regions from the base ends to the tip ends of the vibrating arms. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009182555(A) 申请公布日期 2009.08.13
申请号 JP20080018555 申请日期 2008.01.30
申请人 SEIKO INSTRUMENTS INC 发明人 KOBAYASHI TAKASHI
分类号 H03H9/19;H01L41/09;H01L41/18;H01L41/22;H01L41/29;H01L41/332;H01L41/338;H03B5/32;H03H3/02;H03H9/215 主分类号 H03H9/19
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