| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp in which explosion of a discharge container caused by an edge part that becomes a starting point of breakage can be prevented in the excimer lamp equipped with the discharge container having a tube formed with a rectangular cross-section. SOLUTION: This is the excimer lamp 10 in which the excimer discharge is generated in a discharge space S of the discharge container 11, and in the cross-section cut in parallel with end faces 14a, 14b, long side faces 12a, 12b of the discharge container 11 are formed so that the center parts 18a, 18b of the long side faces 12a, 12b are formed in a curving state heading inward the discharge space S against the edge parts 16a, 16b, 16c, 16d connecting the long side faces 12a, 12b and the short side faces 13a, 13b, while an ultraviolet ray reflecting membrane 20 formed on the surface exposed to the discharge space S of the ultraviolet ray reflecting membrane 20 is horizontally arranged. COPYRIGHT: (C)2009,JPO&INPIT
|
