摘要 |
PROBLEM TO BE SOLVED: To provide a recording head and a manufacturing method thereof which reduces variations of write gap length, improve its productivity, and achieve high precision writing. SOLUTION: This manufacturing method includes steps of: sequentially laminating a first magnetic layer 12 and an insulation layer 10a on the surface of a workpiece to form a magnetic head and forming resists on a first area to form the magnetic pole and on a second area near the floating surface; forming a contact layer 11 in close contact with the insulation layer and the resist; forming a resist pattern 20 on the surface of the workpiece; forming magnetic poles to form a second magnetic layer 22 on the first area; and ion milling the close contact layer 11, the insulation layer 10a, and the first magnetic layer 12 halfway in the thickness direction by using the second magnetic layer 22 as a mask. COPYRIGHT: (C)2009,JPO&INPIT
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