| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric oscillation device which prevents a joining failure due to metal film adherence at the time of frequency adjustment so as to enable fine joining of an piezoelectric oscillation piece to an enclosure, and to provide a piezoelectric oscillation device. <P>SOLUTION: In a piezoelectric oscillation piece assembly made by integrating a plurality of tuning fork type piezoelectric oscillation pieces 4, a pair of junction portions 7 is formed on the front and back surfaces of a base 51 of each piezoelectric oscillation piece 4, respectively. The manufacturing method for the piezoelectric oscillation piece assembly includes: an electrode forming step of forming a plurality of electrodes on each piezoelectric oscillation piece 4; an adjusting film forming step of forming adjusting metal films 43 and 44 on the outer peripheral surfaces of the end areas of a pair of arms 41 and 42; a frequency adjusting step of emitting a laser beam onto the adjusting metal films 43 and 44 to carry out frequency adjustment; and a joining step of separating each piezoelectric oscillation piece 4 from the piezoelectric oscillation piece assembly and then joining junction portions 7c and 7d on the back main surface thereof to the interior of the enclosure. <P>COPYRIGHT: (C)2009,JPO&INPIT |
