| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical mirror device preventing the deterioration of converging performance of incident laser beams and shifting of an irradiating position by preventing the occurrence of distortion in a reflecting surface to maintain profile irregularity, and to provide a fixing method for optical mirror. SOLUTION: The optical mirror device 30 includes: an optical mirror 35 having a reflecting surface 36 for reflecting an incident laser beam to the irradiating position; a fixing means 41 for fixing the optical mirror by pressing the optical mirror from both sides of side surface parts 37 connected to the reflecting surface to make a pair and holding the same; and a rotary driving means 23 connected to the fixing means and including a driving shaft 24 driven to rotate. COPYRIGHT: (C)2009,JPO&INPIT |
