| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a nozzle flow path and a nozzle front-end state are difficult to conduct these accurate confirmations because of a small nozzle, a thin flow path and also the dark inside of a treatment chamber though a maintenance must be adjusted by precisely determining the state of a coating liquid in a liquid flow path in the coating-liquid nozzle at a time when the upper section of a substrate is supplied with the coating liquid. SOLUTION: The coating-liquid nozzle 10 as a cylinder body forming the flow path 105 for the coating liquid supplied from a coating-liquid supply section arranged to a nozzle-carrying mechanism carrying the coating-liquid nozzle 10 movably configured to the upper section of the substrate and being formed of an approximately transparent member is fitted. An incident surface (a D cut surface) 101a formed in a flat shape as a section making an illumination light incident is fitted to a part of the outer periphery of the cylinder body of the coating-liquid nozzle 10. The state of the coating liquid in the coating-liquid nozzle 10 is easily confirmed and adjusted by making the illumination light incident to the incident surface and lightening the flow path for the coating liquid. COPYRIGHT: (C)2009,JPO&INPIT
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