发明名称 |
Methods for Growing Carbon Nanotubes on Single Crystal Substrates |
摘要 |
Methods for growing carbon nanotubes on single crystal substrates are disclosed. A method of producing a nanostructure material comprises coating a single crystal substrate with a catalyst film to form a catalyst coated substrate; annealing the catalyst film by supplying a first promoter gas to the catalyst coated substrate at a first temperature and a first pressure; and supplying a second promoter gas and a carbon-source gas to the catalyst coated substrate in a substantially water-free atmosphere at a second pressure and a second temperature for a time period to cause growth of nanostructures on the catalyst coated substrate. The nanostructure material is used in various applications.
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申请公布号 |
US2009200912(A1) |
申请公布日期 |
2009.08.13 |
申请号 |
US20060090755 |
申请日期 |
2006.10.20 |
申请人 |
THE TRUSTEES OF BOSTON COLLEGE |
发明人 |
REN ZHIFENG;XIONG GUANGYONG;WANG DEZHI;ZENG BAOQING |
分类号 |
H01J1/00;H01L21/20 |
主分类号 |
H01J1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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