发明名称 METHOD OF RECYCLING CHEMICAL
摘要 <p>In order to recycle a chemical, a chemical that is recovered from a predetermined chemical process and includes a foreign substance is reacted with a supercritical fluid to educe the foreign substance. Then, the educed foreign substance is separated from the chemical and the supercritical fluid. Thereafter, the supercritical fluid is separated from the chemical to recover the chemical. A foreign substance included in chemical used in a predetermined process may be easily removed and recycled, thereby reducing amount of a waste chemical to prevent environmental pollution, and reducing cost for disposing waste chemical.</p>
申请公布号 WO2009099294(A2) 申请公布日期 2009.08.13
申请号 WO2009KR00540 申请日期 2009.02.04
申请人 DONGJIN SEMICHEM CO., LTD.;YOON, SUK IL;KIM, SEONG-BAE;SHIN, SUNG-GUN;LEE, SUNG-HYUN;JANG, DOO-YOUNG 发明人 YOON, SUK IL;KIM, SEONG-BAE;SHIN, SUNG-GUN;LEE, SUNG-HYUN;JANG, DOO-YOUNG
分类号 H01L21/205 主分类号 H01L21/205
代理机构 代理人
主权项
地址