| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical solution supply device wherein a plurality of valve devices connected to a plurality of supply ports for supplying chemical solutions are mounted on the upper face and the valve devices are driven to supply arbitrary chemical solutions to a main flow path. SOLUTION: In the chemical solution supply device having a chemical solution supply manifold, the plurality of valve devices connected to the plurality of supply ports for supplying the chemical solutions are mounted on the upper face and the valve devices are driven to supply the arbitrary chemical solutions to the main flow path. An output port is formed at one end of the main flow path, and the valve device mounted at the other end of the main flow path is a washing liquid valve device 4. COPYRIGHT: (C)2009,JPO&INPIT
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