发明名称 Crack Sensors for Semiconductor Devices
摘要 Crack sensors for semiconductor devices, semiconductor devices, methods of manufacturing semiconductor devices, and methods of testing semiconductor devices are disclosed. In one embodiment, a crack sensor includes a conductive structure disposed proximate a perimeter of an integrated circuit. The conductive structure is formed in at least one conductive material layer of the integrated circuit. The conductive structure includes a first end and a second end. A first terminal is coupled to the first end of the conductive structure, and a second terminal is coupled to the second end of the conductive structure.
申请公布号 US2009201043(A1) 申请公布日期 2009.08.13
申请号 US20080030799 申请日期 2008.02.13
申请人 KALTALIOGLU ERDEM 发明人 KALTALIOGLU ERDEM
分类号 G01R31/26;H01L21/66;H01L23/58 主分类号 G01R31/26
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