发明名称 |
ELECTRONIC COMPONENT PICKUP METHOD, ELECTRONIC COMPONENT MOUNTING METHOD AND ELECTRONIC COMPONENT MOUNTING APPARATUS |
摘要 |
This invention intends to provide an electronic component pick-up method, an electronic component loading method and an electronic component loading apparatus which are capable of executing a pick-up operation of an electronic component adhesively held on a carrier stably and with high productivity. In an electronic component pick-up method for picking up a chip 6 adhesively held by an adhesive layer 5a on a sheet 5, as the adhesive layer 5a, an adhesive containing a compound generating a nitrogen gas by application of ultraviolet rays is employed. In the pick-up operation, with a light applying unit 8 being located beneath the chip 6 to be picked up, ultraviolet rays is applied to the adhesive layer 5a located on the rear side of the chip 6 from the lower side of the sheet 5, and the chip 6 is picked up by bringing the holding tool 20 into contact with the upper surface of the chip 6 in a state where the nitrogen gas generated from the adhesive layer 5a has created a gaseous layer G between a bonding boundary between the rear surface of the chip 6 and the adhesive layer 5a.
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申请公布号 |
US2009202333(A1) |
申请公布日期 |
2009.08.13 |
申请号 |
US20050576386 |
申请日期 |
2005.10.04 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
OZONO MITSURU;HAJI HIROSHI;KASAI TERUAKI |
分类号 |
H01L21/673;H01L21/67;H01L21/677 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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