| 摘要 |
<p>Disclosed is a physical quantity sensor that can increase detection accuracy, especially when constructed with movable parts that move in parallel in the height direction. The sensor possesses a support substrate, movable parts (6), which are positioned above the support substrate and are supported so that they can move in parallel in the height direction, and a first sensor (61) and a second sensor (62) for sensing displacement of the movable parts based on changes in electrostatic capacity. The first sensor (61) and second sensor (62) are both constructed with alternately disposed, parallel movable electrodes and stationary electrodes, wherein the movable electrodes are formed as a unit with the movable parts and the stationary electrodes are formed separated from the aforementioned movable electrodes. In the initial state, the movable electrodes and the stationary electrodes are disposed offset in the height direction, with the direction of offset of the first movable electrodes (59) relative to the first stationary electrodes (57) that constitute the first sensor being opposite the direction of offset of the second movable electrodes (60) relative to the second stationary electrodes (58) that constitute the second sensor.</p> |
