| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing apparatus for single crystals by which a seed crystal contacts with a melt at an appropriate melt surface temperature by controlling the heat radiation of the material melt, the cone part does not cause dislocation, since the growth rate of the cone diameter does not exceed the critical value, the first half of the body part does not give rise to dislocation caused by caused by the failure in catching up with the change of the shape of the interface between the solid and the melt, and dislocation-free single crystals are manufactured and a manufacturing method using the manufacturing apparatus for single crystals. SOLUTION: The manufacturing apparatus for single crystals 1 is provided with a main chamber 2 containing at least crucibles 6 and 7 holding a raw material melt 5 and a heater 8 heating the raw material melt 5, a seed holder 13 holding a seed crystal 12 which contacts with the raw material melt 5 and grows a single crystal 4 on the lower part of it and a straightening pipe 14 to straightening the inert gas flow flowing down from the upper part of the raw material melt 5 around the single crystal 4. A conical reflector 17 having a notch to pass the inert gas is arranged above the seed crystal 12. The outer diameter of the reflector 17 is less than the inner diameter of the straightening pipe 14. COPYRIGHT: (C)2009,JPO&INPIT
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