发明名称 LASER IRRADIATION APPARATUS AND METHOD OF FABRICATING ORGANIC LIGHT EMITTING DISPLAY USING THE SAME
摘要 Provided are a laser irradiation apparatus and method of fabricating an organic light emitting display using the same. The laser irradiation apparatus includes a mask positioned below the laser generator, and the mask is patterned such that lengths of an upper portion and a lower portion of a mask pattern are patterned longer than a length of a middle portion of the mask pattern with respect to the scanning direction. The method of fabricating an organic light emitting display includes scanning a laser beam on a predetermined region of the donor substrate using the laser irradiation apparatus to form an organic layer pattern on the substrate. When the organic layer pattern is formed using a laser induced thermal imaging (LITI) method, the transfer may be carried out using a laser beam having low energy, laser beam efficiency may be enhanced, the organic layer may be less damaged, and the quality of the organic layer pattern to be transferred may also be enhanced.
申请公布号 US2009202950(A1) 申请公布日期 2009.08.13
申请号 US20090426821 申请日期 2009.04.20
申请人 SAMSUNG MOBILE DISPLAY CO., LTD. 发明人 LEE JAE-HO;KANG TAE-MIN;LEE SEONG-TAEK;KIM JIN-SOO
分类号 G03F7/20 主分类号 G03F7/20
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