| 摘要 |
PROBLEM TO BE SOLVED: To provide an ejector capable of obtaining a stable suction force. SOLUTION: A bellows 101 surrounding an operation axis 23 of an ejection part 41 comprises a circular ring-shaped base part 111 and a cylindrical portion 112 that is elastic in the lengthwise direction and has the form of a cylindrical bellows. The base part 111 of the bellows 101 adheres to a movable side part 121 comprising the lower surface of the ejection part 41 and the lower surface of a flange part 35 of a connecting member 33. The tip of the cylindrical portion 112 of the bellows 101 adheres to a fixed side part 141 comprising the upper surface of a shelf part 131 projected to the inner side surface of a support part 21 constituting a device body 11. Thereby, through a gap formed between the ejection part 41 and the guide part 61 of a stage fitting part 13, the inside space and the outside space of a negative pressure chamber 82 that is continuous with the lower part of the ejection part 41 are divided with the bellows 101 as a boundary. COPYRIGHT: (C)2009,JPO&INPIT |
