| 摘要 |
PROBLEM TO BE SOLVED: To provide a baking device capable of suitably forming a structure on a substrate. SOLUTION: A substrate shape measurement part 110 of the baking device measures a front long-side distance P1 and a rear long-side distance P2 of a substrate 1 before conveying the substrate 1 to a baking furnace 140. Then, an inputting direction deciding part 120 and an inputting direction control part, if the rear long-side distance P2 is shorter than the front one P1, reverses a loading table 122 by 180°to adjust a direction of the substrate 1 into a state in which a rear long side 1B is conveyed into the baking furnace 140 ahead of the front one 1A. If, on the other hand, the rear long-side distance P2 is longer than the front one P1, a state is maintained in which the front long side 1A is conveyed into the baking furnace 140 ahead of the rear one 1B, without reversing the loading table 122. COPYRIGHT: (C)2009,JPO&INPIT
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