DIAMOND UV SENSOR ELEMENT AND MANUFACTURING METHOD THEREOF, UV SENSOR DEVICE, DIAMOND SINGLE CRYSTAL PROCESSING METHOD

摘要

Disclosed is a method for manufacturing a diamond UV sensor element with improved UV light/visible light blind ratio that uses diamond single crystal as the light-receiving part and that detects light by changes in electrical resistance generated by exposing the light-receiving part to light. Said diamond UV sensor element manufacturing method includes (1) a step for hydrogenating the surface of the diamond single crystal in an atmosphere containing essentially hydrogen and (2) a step for forming the light receiving part by exposing the surface of said hydrogenated diamond single crystal to an atmosphere containing ozone or active oxygen.