| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and program for preparing an evaluation pattern, which can appropriately evaluate pattern transfer fidelity. <P>SOLUTION: The method for preparing a pattern includes: a step of inspecting the pattern transfer fidelity of an object to be inspected for each peripheral candidate pattern, wherein a plurality of the marginal candidate patterns are arranged on a periphery of the object to be inspected; a step of extracting at least one peripheral pattern from among the plurality of the marginal candidate patterns based on the inspection results; and a step of preparing the evaluation pattern by arranging the peripheral patterns on the periphery of the object to be evaluated. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
