| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a wiring board for a probe card, and the probe card, having an inside wiring layer including low resistance metal, and superior in chemical resistance. <P>SOLUTION: This invention is the wiring board for the probe card having an insulating base body 11 composed of an alumina sintered body usingα-Al<SB>2</SB>O<SB>3</SB>as a main crystal and the inside wiring layer 12 formed inside the insulating base body 11 and composed of a composite conductor of at least one kind of low resistance metal selected from a group composed of Cu, Au and Ag and high melting point metal of at least any one of W and Mo, and characterized in that the alumina sintered body has Mn<SB>3</SB>Al<SB>2</SB>Si<SB>3</SB>O<SB>12</SB>, and does not have substantially MnSiO<SB>3</SB>, and assuming diffraction intensity of a (110) surface of theα-Al<SB>2</SB>O<SB>3</SB>in X-ray diffraction as Ia and diffraction intensity of a (420) surface of the Mn<SB>3</SB>Al<SB>2</SB>Si<SB>3</SB>O<SB>12</SB>as Im, a value of Im/Ia is 0.02 to 0.3. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
