| 摘要 |
PROBLEM TO BE SOLVED: To provide a motor suppressing deterioration of detection precision of a position of a movable part. SOLUTION: The motor is provided with a linear motor part 30 moving the movable part 20, a linear scale 41 which is fixedly installed on a fixing part 10 along a moving direction of the movable part 20 and comprises an index showing position information, a magnetic sensor 422 which is fixedly arranged on a side confronted with the linear scale 41 in the movable part 20 and can detect the index, and a controller 50 controlling the linear motor part 30 based on a detection result of the magnetic sensor 422. Projection parts 421c projected to a linear scale 41-side compared to a tip of the linear scale 41-side of the magnetic sensor 422 are arranged in regions on both sides in a moving direction of the magnetic sensor 422 with respect to the magnetic sensor 422 in the fixing part 10. COPYRIGHT: (C)2009,JPO&INPIT |
