| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem of the conventional method for treating an etching solution that complicated operations are required when the alkaline permanganate etching solution is managed or treated and considerable labor is required to manage a filter or an ultrafiltration membrane for filtering the produced soluble carbonate. SOLUTION: When the alkaline permanganate etching solution comprising a carbonate radical is subjected to batch treatment to remove the carbonate radical in the alkaline permanganate etching solution as a hardly-soluble or insoluble solid substance, a predetermined amount of the alkaline permanganate etching solution comprising the carbonate radical is housed in a first reaction chamber 20. A strontium compound, which is reacted with the carbonate radical in the alkaline permanganate etching solution to produce the hardly-soluble or insoluble solid substance, is added to the housed alkaline permanganate etching solution while agitating the housed alkaline permanganate etching solution. The solution in the first reaction chamber 20 is discharged through the first filter 28 arranged in a first liquid discharge part formed in the side or upper part of the first reaction chamber 20 and a precipitate 26, which does not pass through the first filter 28, is precipitated at the bottom of the first reaction chamber 20 and comprises the hardly-soluble or insoluble solid substance, is discharged from the first reaction chamber 20. COPYRIGHT: (C)2009,JPO&INPIT
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