| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an article delivery apparatus for clean room reducing the amount of antiseptic solution and suppressing the smell of the antiseptic solution stinking from the article passing a pass box. <P>SOLUTION: This article delivery apparatus for the clean room sterilizes and carries the articles in a working area in the clean room sprays the antiseptic solution after an air shower. The air shower is performed before spraying the antiseptic solution so as to remove dust and the like and sufficiently sterilize them at a little amount of the antiseptic solution. This device can thus dissolve the offensive smell for the workers in the clean room and a trouble of giving them stress, even if it is the antiseptic solution smell stinking from the article sterilized by the spray of the antiseptic solution and passing the pass box. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
