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发明名称
SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
EP1271603(B1)
申请公布日期
2009.08.12
申请号
EP20000913013
申请日期
2000.03.31
申请人
HITACHI, LTD.
发明人
TODOKORO, HIDEO;EZUMI, MAKOTO;OSE, YOICHI;SUZUKI, NAOMASA
分类号
H01J37/22;G01Q30/02;H01J37/244;H01J37/28
主分类号
H01J37/22
代理机构
代理人
主权项
地址
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