| 摘要 |
<p>A charged particle beam device for irradiating a sample (12) with a primary charged particle beam generated by a beam source (1, 2, 5), and detecting electrons emitted from the sample (12), comprises an energy filter (50) for filtering the electrons emitted from the sample (12), a first detector (18, 115) for detecting electrons indicating the electric potential contrast of the sample (12), and a second detector (42, 118) for detecting electrons indicating the shape of the sample (12). The first detector (18, 115) detects energy-filtered electrons, and said second detector (42, 118) detects electrons are not energy-filtered.</p> |
