发明名称 |
Semiconductor device and method for manufacturing the same |
摘要 |
<p>A semiconductor device includes a p-type active region and an n-type active region which are formed in a semiconductor substrate and a p-type MISFET including a gate insulating film (1006) formed on the p-type active region and a first gate electrode including a first electrode formation film (1015) of which upper part has a concentration of La higher than the other part thereof. The semiconductor device further includes an n-type MISFET including a gate insulating film (1006) formed on the n-type active region and a second gate electrode including a second electrode formation film (1014) of which upper part has a concentration of A1 higher than the other part thereof.
</p> |
申请公布号 |
EP1959491(A3) |
申请公布日期 |
2009.08.12 |
申请号 |
EP20070113787 |
申请日期 |
2007.08.03 |
申请人 |
PANASONIC CORPORATION;IMEC |
发明人 |
MITSUHASHI, RIICHIRO;SINGANAMALLA, RAGHUNATH |
分类号 |
H01L21/8238;H01L21/8234;H01L27/088;H01L27/092 |
主分类号 |
H01L21/8238 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|