发明名称 Semiconductor device and method for manufacturing the same
摘要 <p>A semiconductor device includes a p-type active region and an n-type active region which are formed in a semiconductor substrate and a p-type MISFET including a gate insulating film (1006) formed on the p-type active region and a first gate electrode including a first electrode formation film (1015) of which upper part has a concentration of La higher than the other part thereof. The semiconductor device further includes an n-type MISFET including a gate insulating film (1006) formed on the n-type active region and a second gate electrode including a second electrode formation film (1014) of which upper part has a concentration of A1 higher than the other part thereof. </p>
申请公布号 EP1959491(A3) 申请公布日期 2009.08.12
申请号 EP20070113787 申请日期 2007.08.03
申请人 PANASONIC CORPORATION;IMEC 发明人 MITSUHASHI, RIICHIRO;SINGANAMALLA, RAGHUNATH
分类号 H01L21/8238;H01L21/8234;H01L27/088;H01L27/092 主分类号 H01L21/8238
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