GAS INLET ELEMENT FOR A CVD REACTOR,申请号EP20060724824-传众专利搜索

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发明名称	GAS INLET ELEMENT FOR A CVD REACTOR
摘要
申请公布号	EP1861520(B1)	申请公布日期	2009.08.12
申请号	EP20060724824	申请日期	2006.01.05
申请人	AIXTRON AG	发明人	REINHOLD, MARKUS;BAUMANN, PETER
分类号	C23C16/455	主分类号	C23C16/455
代理机构		代理人
主权项
地址

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