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发明名称
摘要
申请公布号
JP4312915(B2)
申请公布日期
2009.08.12
申请号
JP20000012574
申请日期
2000.01.21
申请人
发明人
分类号
H01L21/822;H01L21/8234;H01L27/04;H01L27/088;H01L27/10;H01L29/78;H01L29/786
主分类号
H01L21/822
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代理人
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地址
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