发明名称 METHOD AND APPARATUS FOR OBTAINING THE DISTANCE FROM AN OPTICAL MEASUREMENT INSTRUMENT TO AND OBJECT UNDER TEST
摘要 Systems and methods for measuring a distance from a reference plane of an optical measurement instrument to a reference plane of an optical device under test are disclose. In one embodiment a system for measuring this distance includes an illumination system, an optical system, and optical sensor and a processor. The illumination system is configured or adapted to illuminate the object under test. The optical system is configured or adapted to receive light from the object under test and to produce an aberrated image. The optical sensor is configured or adapted to receive and sense the aberrated image. The processor determines the distance from the reference plane of the optical measurement instrument to the reference plane of the optical device based on an aspect of the aberrated image sensed by the optical sensor.
申请公布号 EP2087310(A2) 申请公布日期 2009.08.12
申请号 EP20070845028 申请日期 2007.11.09
申请人 AMO WAVEFRONT SCIENCES, LLC 发明人 BAER, C. DAVID;NEAL, DANIEL R.;COPLAND, RICHARD JAMES;NEAL, DAVID AUSTIN
分类号 G01B11/02 主分类号 G01B11/02
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