发明名称 |
Vacuum pump |
摘要 |
A vacuum pump is provided in which gas molecules in a vacuum chamber are sucked and exhausted by the rotational motion of a rotor rotatably supported in a pump case. At least one nickel alloy layer is disposed on a surface of at least one component defining a flow path in the vacuum pump for increasing a resistance of the component to corrosion due to a corrosive effect of a gas flowing through the flowpath. A nickel oxide is formed on a surface of the nickel alloy layer and has a higher emissivity than that of the nickel alloy layer for increasing a quantity of heat radiated from the surface of the component when the component is heated during operation of the vacuum pump.
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申请公布号 |
US7572096(B2) |
申请公布日期 |
2009.08.11 |
申请号 |
US20050092898 |
申请日期 |
2005.03.29 |
申请人 |
BOC EDWARDS JAPAN LIMITED |
发明人 |
NONAKA MANABU;WADA AKIHIKO |
分类号 |
F03B11/02;F04D19/04;F04D29/02 |
主分类号 |
F03B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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