发明名称 Thermal field emission electron gun with reduced arcing
摘要 One embodiment relates to a thermal field emission electron gun. The electron gun includes a high-vacuum chamber, a thermal field emission cathode including a filament and a tip, a suppressor electrode, an extraction electrode, and a high-voltage power source. The high-voltage power source is coupled to the filament and to the suppressor and extraction electrodes such that the suppressor electrode is at a negative voltage potential in relation to the filament and the extraction electrode is at a positive voltage potential in relation to the filament. A current-limiting resistor is electrically coupled in series with the suppressor electrode. Applicant has determined that such a current-limiting resistor substantially reduces undesirable discharges and improve the reliability and lifetime of the electron gun. Other embodiments, aspects and features are also disclosed.
申请公布号 US7573046(B1) 申请公布日期 2009.08.11
申请号 US20070728664 申请日期 2007.03.26
申请人 KLA-TENCOR TECHNOLOGIES CORPORATION 发明人 CHUBUN NIKOLAI N.
分类号 H01J37/141 主分类号 H01J37/141
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