发明名称 |
Crystallization apparatus and crystallization method |
摘要 |
A crystallization apparatus includes an illumination system which illuminates a phase-shift mask and an image-forming optical system arranged in an optical path between the phase-shift mask and a semiconductor film. The semiconductor film is irradiated with a light beam having a light intensity distribution of inverted peak patterns whose light intensity is the lowest in portions corresponding to phase shift sections to form a crystallized semiconductor film. The image-forming optical system is located to optically conjugate the phase-shift mask and the semiconductor film and has an aberration corresponding to the given wavelength range to form a light intensity distribution of inverted peak patterns with no swell of intensity in the middle portion.
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申请公布号 |
US7572335(B2) |
申请公布日期 |
2009.08.11 |
申请号 |
US20040958396 |
申请日期 |
2004.10.06 |
申请人 |
ADVANCED LCD TECHNOLOGIES DEVELOPMENT CENTER CO.,LTD. |
发明人 |
TANIGUCHI YUKIO;MATSUMURA MASAKIYO;YAMAGUCHI HIROTAKA;NISHITANI MIKIHIKO;TSUJIKAWA SUSUMU;KIMURA YOSHINOBU;JYUMONJI MASAYUKI |
分类号 |
C30B35/00;B23K26/06;H01L21/20;H01L21/268;H01L21/336;H01L29/786 |
主分类号 |
C30B35/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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