发明名称 Method of fabricating light emitting diode
摘要 Disclosed herein is a method of fabricating a light emitting diode. The method comprises preparing a substrate, forming a lower semiconductor layer, an active layer and an upper semiconductor layer on the substrate, forming a photoresist pattern over the upper semiconductor layer such that a sidewall of the photoresist pattern is inclined to an upper surface of the substrate, and sequentially etching the upper semiconductor layer, active layer and lower semiconductor layer using the photoresist pattern as an etching mask. With this structure, since the light emitting diode permits light generated in the active layer to be easily emitted to an outside through the sidewalls of the semiconductor layers, it has improved light emitting efficiency.
申请公布号 US7572653(B2) 申请公布日期 2009.08.11
申请号 US20070750955 申请日期 2007.05.18
申请人 SEOUL OPTO DEVICE CO., LTD. 发明人 KIM JONG HWAN;YOON YEO JIN;LEE JAE HO
分类号 H01L21/00;H01L33/06;H01L21/311;H01L33/32;H01L33/42 主分类号 H01L21/00
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