发明名称 Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application
摘要 A method and apparatus for forming a semiconductor sheet suitable for use as a solar cell by depositing an array of solidified drops of a feed material on a sheet support. The desired properties of the sheet fabricated with the teaching of this invention are: flatness, low residual stress, minority carrier diffusion length greater than 40 microns, and minimum grain dimension at least two times the minority carrier diffusion length. In one embodiment, the deposition chamber is adapted to form and process sheets that have a surface area of about 1,000-2,400 cm2.
申请公布号 US7572334(B2) 申请公布日期 2009.08.11
申请号 US20060325089 申请日期 2006.01.03
申请人 APPLIED MATERIALS, INC. 发明人 KHOLODENKO ARNOLD V.;BACHRACH ROBERT Z.;MANDELBOYM MARK
分类号 C30B11/00;B05C11/00 主分类号 C30B11/00
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