发明名称 |
Micromechanical mirrors with a high-reflection coating, method for production thereof and use thereof |
摘要 |
The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminum layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.
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申请公布号 |
US7573634(B2) |
申请公布日期 |
2009.08.11 |
申请号 |
US20050630175 |
申请日期 |
2005.06.27 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUER FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
SCHMIDT UWE JAN;SANDNER THILO;SCHENK HARALD;GATTO ALEXANDRE;YANG MINGHONG;HEBER JOERG;KAISER NORBERT |
分类号 |
G02B5/08 |
主分类号 |
G02B5/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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